Filter EPD
$599.00
The sensor detects endpoints of the etching process and changes in etchant or by-product through light absorption in the semiconductor ash/strip chamber
- PR/ACL strip
- Single or dual filter type
- Endpoint detection by EPD algorithm
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FilterEPD
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The sensor detects endpoints of the etching process and changes in etchant or by-product through light absorption in the semiconductor ash/strip chamber
- PR/ACL strip
- Single or dual filter type
- Endpoint detection by EPD algorithm